抑制双极电流的锥形通道工程

Y. Morgan, M. Abouelatta, M. El-Banna, A. Shaker
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引用次数: 1

摘要

本文提出了一种基于锥形沟道结构的新型Si-TFET。本研究中提出的锥形通道设计在源侧比漏侧提供更高的厚度,而源侧的栅极氧化物比漏侧的栅极氧化物要小。通过改变锥道长度和厚度,利用Silvaco TCAD仿真对该结构进行了研究。研究发现,通过设计30 nm的锥度长度和6 nm的厚度,可以实现最小的亚阈值和双极导通以及更高的开/关电流比。优化结构的双极电流约为$10^{-14}\ \mathrm{A}/\mu\ \mathrm{m}$,而传统结构的双极电流为10−10 A/µm。同时,OFF电流降低到$10^{-17}\ \mathrm{A}/\mu\ \mathrm{m}$左右,离子略有下降;然而,(开/关)电流比增加。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Tapered-Shape Channel Engineering for Suppression of Ambipolar Current in TFET
This paper proposes a novel Si-TFET based on a tapered channel structure. The taper-channel design presented in this work provides a higher thickness at the source side than at the drain side, whereas the gate oxide is lesser at the source than at the drain side. The structure is investigated by varying the taper channel length and thickness using Silvaco TCAD simulation. It is found that, by engineering a taper length of 30 nm and thickness of 6 nm, a minimum subthreshold and ambipolar conduction as well as higher ON/OFF current ratio are achieved. The ambipolar current of the optimized structure is approximately $10^{-14}\ \mathrm{A}/\mu\ \mathrm{m}$ compared to 10−10 A/µm regarding the conventional structure. Also, the OFF current is decreased to about $10^{-17}\ \mathrm{A}/\mu\ \mathrm{m}$ with a little drop in ION; however, an increase in the (ON/OFF) current ratio is obtained.
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