经典和双光子光电激光刺激失效分析能力的比较

18th IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA) Pub Date : 2011-07-04 DOI:10.1109/IPFA.2011.5992781

K. Shao, V. Pouget, E. Faraud, C. Larue, D. Lewis

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引用次数: 0

摘要

本文综述了双光子吸收(TPA)激光刺激技术的重要参数，并给出了沿横向和轴向的TPA有效光斑尺寸表征结果。将TPA扫描与经典光电刺激图像进行比较，以研究TPA在故障分析和设计调试中的能力。

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Comparison of classical and two-photon photoelectric laser stimulation capabilities for failure analysis

This paper reviews important parameters for the two-photon absorption (TPA) laser stimulation technique and presents results concerning the characterization of the TPA effective spot size along lateral and axial directions. TPA scans are compared with classical photoelectric stimulation images to investigate TPA capabilities for failure analysis and design debug.

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18th IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA)

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