功率器件用半导体晶圆的偏振光观测

2022 IEEE International Meeting for Future of Electron Devices, Kansai (IMFEDK) Pub Date : 2022-11-28 DOI:10.1109/IMFEDK56875.2022.9975432

K. Murayama, Seiya Mizutani, Yuya Mizutani, S. Harada

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引用次数: 1

摘要

偏振光观测是一种很有前途的用于功率器件半导体晶圆无损表征的方法。我们用双折射成像技术可视化了SiC晶圆中缺陷的分布。

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Polarized light observation of semiconductor wafers for power devices

Polarized light observation is one of the promising methods for the non-destructive characterization of semiconductor wafers for power devices. We have visualized the distribution of defects in SiC wafers by birefringence imaging.

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来源期刊

2022 IEEE International Meeting for Future of Electron Devices, Kansai (IMFEDK)

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