采用A - si引脚光电二极管和多晶硅tft集成在透明衬底上的32*32二维光电探测器阵列

1992 International Technical Digest on Electron Devices Meeting Pub Date : 1900-01-01 DOI:10.1109/IEDM.1992.307452

M. Okamura, K. Kimura, S. Shirai, N. Yamauchi

{"title":"采用A - si引脚光电二极管和多晶硅tft集成在透明衬底上的32*32二维光电探测器阵列","authors":"M. Okamura, K. Kimura, S. Shirai, N. Yamauchi","doi":"10.1109/IEDM.1992.307452","DOIUrl":null,"url":null,"abstract":"We have designed, fabricated, and characterized a 32*32 two-dimensional photodetector array using amorphous silicon (a-Si) pin photodiodes and polysilicon (poly-Si) TFTs integrated on a transparent substrate. This work demonstrates the feasibility of a light-transmitting two-dimensional photodetector array for use in parallel optoelectronic systems such as free-space photonic switching systems.<<ETX>>","PeriodicalId":287098,"journal":{"name":"1992 International Technical Digest on Electron Devices Meeting","volume":"68 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":"{\"title\":\"A 32*32 two-dimensional photodetector array using a-Si pin photodiodes and poly-Si TFTs integrated on a transparent substrate\",\"authors\":\"M. Okamura, K. Kimura, S. Shirai, N. Yamauchi\",\"doi\":\"10.1109/IEDM.1992.307452\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"We have designed, fabricated, and characterized a 32*32 two-dimensional photodetector array using amorphous silicon (a-Si) pin photodiodes and polysilicon (poly-Si) TFTs integrated on a transparent substrate. This work demonstrates the feasibility of a light-transmitting two-dimensional photodetector array for use in parallel optoelectronic systems such as free-space photonic switching systems.<<ETX>>\",\"PeriodicalId\":287098,\"journal\":{\"name\":\"1992 International Technical Digest on Electron Devices Meeting\",\"volume\":\"68 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1900-01-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"2\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"1992 International Technical Digest on Electron Devices Meeting\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/IEDM.1992.307452\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"1992 International Technical Digest on Electron Devices Meeting","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IEDM.1992.307452","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 2

摘要

我们设计、制造并表征了一个32*32的二维光电探测器阵列，该阵列使用非晶硅(a- si)引脚光电二极管和集成在透明衬底上的多晶硅(poly-Si) tft。这项工作证明了用于平行光电系统(如自由空间光子开关系统)的透光二维光电探测器阵列的可行性。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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A 32*32 two-dimensional photodetector array using a-Si pin photodiodes and poly-Si TFTs integrated on a transparent substrate

We have designed, fabricated, and characterized a 32*32 two-dimensional photodetector array using amorphous silicon (a-Si) pin photodiodes and polysilicon (poly-Si) TFTs integrated on a transparent substrate. This work demonstrates the feasibility of a light-transmitting two-dimensional photodetector array for use in parallel optoelectronic systems such as free-space photonic switching systems.<>

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来源期刊

1992 International Technical Digest on Electron Devices Meeting

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