具有高宽高比的孔MEM谐振器，用于高精度的频率微调

2011 Proceedings of the European Solid-State Device Research Conference (ESSDERC) Pub Date : 2011-10-13 DOI:10.1109/ESSDERC.2011.6044219

Y. Civet, S. Basrour, F. Casset, B. Icard, D. Mercier, J. Carpentier, J. Bustos, F. Leverd

{"title":"具有高宽高比的孔MEM谐振器，用于高精度的频率微调","authors":"Y. Civet, S. Basrour, F. Casset, B. Icard, D. Mercier, J. Carpentier, J. Bustos, F. Leverd","doi":"10.1109/ESSDERC.2011.6044219","DOIUrl":null,"url":null,"abstract":"This paper deals with a new compensation method to insure Micro-Electro-Mechanical (MEM) resonators frequency accuracy. We report new results of modeling, fabrication and characterization of MEM resonators frequency compensated fulfilling industry requirements respect to CMOS compatibility and collective correction. Both clamped-clamped beam and bulk mode resonators presenting compensation holes are treated.","PeriodicalId":161896,"journal":{"name":"2011 Proceedings of the European Solid-State Device Research Conference (ESSDERC)","volume":"13 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2011-10-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Holed MEM resonators with high aspect ratio, for high accuracy frequency trimming\",\"authors\":\"Y. Civet, S. Basrour, F. Casset, B. Icard, D. Mercier, J. Carpentier, J. Bustos, F. Leverd\",\"doi\":\"10.1109/ESSDERC.2011.6044219\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This paper deals with a new compensation method to insure Micro-Electro-Mechanical (MEM) resonators frequency accuracy. We report new results of modeling, fabrication and characterization of MEM resonators frequency compensated fulfilling industry requirements respect to CMOS compatibility and collective correction. Both clamped-clamped beam and bulk mode resonators presenting compensation holes are treated.\",\"PeriodicalId\":161896,\"journal\":{\"name\":\"2011 Proceedings of the European Solid-State Device Research Conference (ESSDERC)\",\"volume\":\"13 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2011-10-13\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2011 Proceedings of the European Solid-State Device Research Conference (ESSDERC)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ESSDERC.2011.6044219\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2011 Proceedings of the European Solid-State Device Research Conference (ESSDERC)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ESSDERC.2011.6044219","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 1

摘要

提出了一种保证微机电谐振器频率精度的补偿方法。我们报告了MEM谐振器频率补偿的建模，制造和表征的新结果，满足了CMOS兼容性和集体校正方面的行业要求。对具有补偿孔的箝位-箝位光束和体模谐振器进行了处理。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

查看原文本刊更多论文

Holed MEM resonators with high aspect ratio, for high accuracy frequency trimming

This paper deals with a new compensation method to insure Micro-Electro-Mechanical (MEM) resonators frequency accuracy. We report new results of modeling, fabrication and characterization of MEM resonators frequency compensated fulfilling industry requirements respect to CMOS compatibility and collective correction. Both clamped-clamped beam and bulk mode resonators presenting compensation holes are treated.

求助全文

通过发布文献求助，成功后即可免费获取论文全文。去求助

来源期刊

2011 Proceedings of the European Solid-State Device Research Conference (ESSDERC)

自引率

0.00%

发文量