3d堆叠单晶硅x射线镜的结合强度

2017 5th International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D) Pub Date : 2017-05-01 DOI:10.23919/LTB-3D.2017.7947410

D. Girou, B. Landgraf, Ramses Guenther, M. Collon, M. Beijersbergen

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引用次数: 0

摘要

本文研究了平面直键结构单晶硅x射线反射镜的结合强度。我们报告了样品的制造方法和拉伸强度测试测量，用于研究退火的影响。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Bond strength of 3D-stacked monocrystalline silicon X-ray mirrors

This paper investigates the bond strength of flat directly-bonded structured monocrystalline silicon X-ray mirrors. We report on the sample manufacturing method and tensile strength testing measurements used to study the influence of annealing.

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2017 5th International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D)

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