梁柱大变形。垂直屈曲探针的封闭形式解决方案和设计指南

T. Hauck, W. Muller
{"title":"梁柱大变形。垂直屈曲探针的封闭形式解决方案和设计指南","authors":"T. Hauck, W. Muller","doi":"10.1109/ESIME.2010.5464544","DOIUrl":null,"url":null,"abstract":"Higher pin count and reduced pitch along with increased wafer size set new demands to fine pitch wafer probe technology. Vertical buckling probe needles are one of the available concepts. The required elasticity for contacting the pad is achieved by buckling of the needles. The buckling mode guarantees a consistent contact pressure over a large range of overtravel and thus allows for an optimal tolerance even under changing planarity conditions of the wafer. However, the dimensioning of a buckling needle for specified contact forces seems impossible for designers. Therefore, the authors present closed form solutions for large deformation of buckling beam columns. It is an extension of the Euler buckling cases known from textbooks and goes back to a publication of Thimoshenko regarding the first Euler case. This solution will now be discussed and extended to the fourth Euler case. Its applications will be demonstrated for a vertical buckling probe needle with one end built in and the other end guided by a guide plate. A closed form solution of the force-deflection characteristic will be presented and compared with geometrical nonlinear finite element analysis.","PeriodicalId":152004,"journal":{"name":"2010 11th International Thermal, Mechanical & Multi-Physics Simulation, and Experiments in Microelectronics and Microsystems (EuroSimE)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2010-04-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"7","resultStr":"{\"title\":\"Large deformation of beam columns - a closed form solution and design guide for vertical buckling probe needles\",\"authors\":\"T. Hauck, W. Muller\",\"doi\":\"10.1109/ESIME.2010.5464544\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Higher pin count and reduced pitch along with increased wafer size set new demands to fine pitch wafer probe technology. Vertical buckling probe needles are one of the available concepts. The required elasticity for contacting the pad is achieved by buckling of the needles. The buckling mode guarantees a consistent contact pressure over a large range of overtravel and thus allows for an optimal tolerance even under changing planarity conditions of the wafer. However, the dimensioning of a buckling needle for specified contact forces seems impossible for designers. Therefore, the authors present closed form solutions for large deformation of buckling beam columns. It is an extension of the Euler buckling cases known from textbooks and goes back to a publication of Thimoshenko regarding the first Euler case. This solution will now be discussed and extended to the fourth Euler case. Its applications will be demonstrated for a vertical buckling probe needle with one end built in and the other end guided by a guide plate. A closed form solution of the force-deflection characteristic will be presented and compared with geometrical nonlinear finite element analysis.\",\"PeriodicalId\":152004,\"journal\":{\"name\":\"2010 11th International Thermal, Mechanical & Multi-Physics Simulation, and Experiments in Microelectronics and Microsystems (EuroSimE)\",\"volume\":\"1 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2010-04-26\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"7\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2010 11th International Thermal, Mechanical & Multi-Physics Simulation, and Experiments in Microelectronics and Microsystems (EuroSimE)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ESIME.2010.5464544\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2010 11th International Thermal, Mechanical & Multi-Physics Simulation, and Experiments in Microelectronics and Microsystems (EuroSimE)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ESIME.2010.5464544","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 7

摘要

随着晶圆尺寸的增加,引脚数的增加和间距的减小对细间距晶圆探头技术提出了新的要求。垂直屈曲探针是一种可行的方法。接触垫所需的弹性是通过针的屈曲来实现的。屈曲模式保证了在大范围的超行程范围内保持一致的接触压力,因此即使在晶圆片平面度变化的条件下也可以实现最佳公差。然而,对于设计人员来说,根据特定的接触力确定屈曲针的尺寸似乎是不可能的。因此,作者提出了大变形屈曲梁柱的闭合解。它是课本上已知的欧拉屈曲情况的延伸,可以追溯到Thimoshenko关于第一个欧拉情况的出版物。这个解现在将被讨论并扩展到第四种欧拉情形。将演示其应用于一端内建,另一端由导板引导的垂直屈曲探针针。提出了一种力-挠度特性的封闭解,并与几何非线性有限元分析进行了比较。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Large deformation of beam columns - a closed form solution and design guide for vertical buckling probe needles
Higher pin count and reduced pitch along with increased wafer size set new demands to fine pitch wafer probe technology. Vertical buckling probe needles are one of the available concepts. The required elasticity for contacting the pad is achieved by buckling of the needles. The buckling mode guarantees a consistent contact pressure over a large range of overtravel and thus allows for an optimal tolerance even under changing planarity conditions of the wafer. However, the dimensioning of a buckling needle for specified contact forces seems impossible for designers. Therefore, the authors present closed form solutions for large deformation of buckling beam columns. It is an extension of the Euler buckling cases known from textbooks and goes back to a publication of Thimoshenko regarding the first Euler case. This solution will now be discussed and extended to the fourth Euler case. Its applications will be demonstrated for a vertical buckling probe needle with one end built in and the other end guided by a guide plate. A closed form solution of the force-deflection characteristic will be presented and compared with geometrical nonlinear finite element analysis.
求助全文
通过发布文献求助,成功后即可免费获取论文全文。 去求助
来源期刊
自引率
0.00%
发文量
0
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
确定
请完成安全验证×
copy
已复制链接
快去分享给好友吧!
我知道了
右上角分享
点击右上角分享
0
联系我们:info@booksci.cn Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。 Copyright © 2023 布克学术 All rights reserved.
京ICP备2023020795号-1
ghs 京公网安备 11010802042870号
Book学术文献互助
Book学术文献互助群
群 号:604180095
Book学术官方微信