用于触觉反馈的显示兼容压电微机械超声换能器的建模

2019 20th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE) Pub Date : 2019-03-01 DOI:10.1109/EUROSIME.2019.8724526

A. Halbach, P. Gijsenbergh, Y. Jeong, M. Billen, C. Chare, H. Gao, G. Torri, D. Cheyns, X. Rottenberg, V. Rochus

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引用次数: 2

摘要

本文建立了具有物理代表性的600 um直径聚合物基压电微机械超声换能器(PMUT)电等效集总模型。集总模型中的所有参数值都是基于空气和真空中的电阻抗测量来确定的。利用该模型对发射声压、辐射声功率和总功率效率进行了预测。通过实验数据和有限元模拟验证了预测结果。最后，该模型用于估计在给定焦点处达到预期触觉传感阈值所需的最小PMUT阵列尺寸。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Modelling of display-compatible piezoelectric micromachined ultrasonic transducers for haptic feedback

In this paper, a physically representative electric equivalent lumped model of a fabricated 600 um diameter polymer-based piezoelectric micromachined ultrasonic transducer (PMUT) is detailed. All parameter values in the lumped model are identified based on electrical impedance measurements in air and in vacuum. The model is then used to predict the emitted ultrasound pressure, the radiated acoustic power and the overall power efficiency. The predictions are validated with experimental data and finite element simulations. Finally, the model is used to estimate the minimum PMUT array size required to reach the expected haptic sensing threshold at a given focus point.

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2019 20th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE)

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