磷烯纳米带mosfet的量子输运模拟:金属接触、弹道性和串联电阻的影响

M. Poljak, M. Matić
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引用次数: 3

摘要

利用原子量子输运模拟研究了磷烯纳米带mosfet在“3nm”逻辑技术节点上的性能,重点研究了金属触点、串联电阻和输运弹道的影响。我们发现,实际的金属触点可减少漏极电流达70%, which corresponds to more than $1400 \Omega \mu \mathrm{m}$ in contact resistance (RSD). On the other hand, setting RSD to $270 \Omega \mu\mathrm{m}$, as foreseen by the International Roadmap for Devices and Systems (IRDS), PNR MOSFETs would need to operate at 50% to 70% of their ballistic limit, depending on PNR width, in order to meet IRDS targets.
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Quantum Transport Simulations of Phosphorene Nanoribbon MOSFETs: Effects of Metal Contacts, Ballisticity and Series Resistance
Performance of phosphorene nanoribbon (PNR) MOSFETs at “3 nm” logic technology node is studied using atomistic quantum transport simulations, with an emphasis on the impact of metal contacts, series resistance and transport ballisticity. We find that realistic metal contacts decrease drain current by up to 70%, which corresponds to more than $1400 \Omega \mu \mathrm{m}$ in contact resistance (RSD). On the other hand, setting RSD to $270 \Omega \mu\mathrm{m}$, as foreseen by the International Roadmap for Devices and Systems (IRDS), PNR MOSFETs would need to operate at 50% to 70% of their ballistic limit, depending on PNR width, in order to meet IRDS targets.
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