电流体动力(EHD)微型船

2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems Pub Date : 2007-04-23 DOI:10.1109/NEMS.2007.352087

Jiun-Min Wang, Tzu-Yuan Lin, Lung-Jieh Yang

{"title":"电流体动力(EHD)微型船","authors":"Jiun-Min Wang, Tzu-Yuan Lin, Lung-Jieh Yang","doi":"10.1109/NEMS.2007.352087","DOIUrl":null,"url":null,"abstract":"This paper describes about the fabrication and testing of a novel electrohydrodynamic (EHD) micro-boat using parylene MEMS technology. The driven force of micro-boat utilizes the reaction force of the EHD, with planar electrodes, to pump nonpolar liquid. As a result, by applying a DC voltage of 30-40 V the instantaneous moving velocity of the EHD micro-boat is about 6.5 mm/min.","PeriodicalId":364039,"journal":{"name":"2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"688 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2007-04-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"7","resultStr":"{\"title\":\"Electrohydrodynamic (EHD) Micro-Boat\",\"authors\":\"Jiun-Min Wang, Tzu-Yuan Lin, Lung-Jieh Yang\",\"doi\":\"10.1109/NEMS.2007.352087\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This paper describes about the fabrication and testing of a novel electrohydrodynamic (EHD) micro-boat using parylene MEMS technology. The driven force of micro-boat utilizes the reaction force of the EHD, with planar electrodes, to pump nonpolar liquid. As a result, by applying a DC voltage of 30-40 V the instantaneous moving velocity of the EHD micro-boat is about 6.5 mm/min.\",\"PeriodicalId\":364039,\"journal\":{\"name\":\"2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems\",\"volume\":\"688 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2007-04-23\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"7\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/NEMS.2007.352087\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/NEMS.2007.352087","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 7

摘要

本文介绍了利用聚对二甲苯微机电系统技术制造一种新型电流体动力(EHD)微船并进行了测试。微船的驱动力利用EHD的反作用力，采用平面电极泵送非极性液体。因此，通过施加30-40 V的直流电压，EHD微型船的瞬时移动速度约为6.5 mm/min。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

查看原文本刊更多论文

Electrohydrodynamic (EHD) Micro-Boat

This paper describes about the fabrication and testing of a novel electrohydrodynamic (EHD) micro-boat using parylene MEMS technology. The driven force of micro-boat utilizes the reaction force of the EHD, with planar electrodes, to pump nonpolar liquid. As a result, by applying a DC voltage of 30-40 V the instantaneous moving velocity of the EHD micro-boat is about 6.5 mm/min.

求助全文

通过发布文献求助，成功后即可免费获取论文全文。去求助

来源期刊

2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems

自引率

0.00%

发文量