标准单元的DFM指标

R. Aitken
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引用次数: 19

摘要

随着工艺几何尺寸的缩小,可制造性设计(DFM)变得越来越重要。传统的设计规则通过/失败不足以量化DFM遵从性。相反,我们需要指标来比较设计。产量可能是一个理想的指标,但在没有重要的生产数据的情况下很难客观地计算出来。本文研究了好的度量所需要的质量,并展示了一个看起来很有希望的方法的例子
本文章由计算机程序翻译,如有差异,请以英文原文为准。
DFM metrics for standard cells
Design for manufacturability (DFM) is becoming increasingly important as process geometries shrink. Conventional design rule pass/fail is not adequate to quantify DFM compliance. Instead, metrics are needed to compare designs. Yield might be an ideal metric, but is difficult to calculate objectively without significant manufacturing data. This paper investigates the qualities that good metrics require and shows an example of an approach that seems promising
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