通过共面传输线阻抗测量观察衬底特性

L. Floyd, J. Pike, Jing Tao, N. Jackson
{"title":"通过共面传输线阻抗测量观察衬底特性","authors":"L. Floyd, J. Pike, Jing Tao, N. Jackson","doi":"10.1109/ICMTS.2015.7106099","DOIUrl":null,"url":null,"abstract":"In the course of developing a GaAs Schottky diode membrane technology for millimeter wave applications (viz. THz mixers and multipliers) it was found that subtle changes and variations introduced into the membrane structure can significantly affect the circuit performance. We describe how these effects manifest themselves and, using S-parameter measurements on a variety of substrates, show how they can be explained in terms of conductive or charge layers that are observable through Coplanar Transmission Line Impedance measurements. A modified transmission line model is given.","PeriodicalId":177627,"journal":{"name":"Proceedings of the 2015 International Conference on Microelectronic Test Structures","volume":"90 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2015-03-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Observations on substrate characterisation through Coplanar Transmission Line Impedance measurements\",\"authors\":\"L. Floyd, J. Pike, Jing Tao, N. Jackson\",\"doi\":\"10.1109/ICMTS.2015.7106099\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In the course of developing a GaAs Schottky diode membrane technology for millimeter wave applications (viz. THz mixers and multipliers) it was found that subtle changes and variations introduced into the membrane structure can significantly affect the circuit performance. We describe how these effects manifest themselves and, using S-parameter measurements on a variety of substrates, show how they can be explained in terms of conductive or charge layers that are observable through Coplanar Transmission Line Impedance measurements. A modified transmission line model is given.\",\"PeriodicalId\":177627,\"journal\":{\"name\":\"Proceedings of the 2015 International Conference on Microelectronic Test Structures\",\"volume\":\"90 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2015-03-23\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Proceedings of the 2015 International Conference on Microelectronic Test Structures\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ICMTS.2015.7106099\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings of the 2015 International Conference on Microelectronic Test Structures","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICMTS.2015.7106099","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1

摘要

在开发用于毫米波应用(即太赫兹混频器和乘频器)的GaAs肖特基二极管膜技术的过程中,发现膜结构的细微变化和变化会显著影响电路的性能。我们描述了这些效应是如何表现出来的,并使用在各种衬底上的s参数测量,展示了如何用通过共面传输线阻抗测量可观察到的导电层或电荷层来解释它们。给出了一种改进的传输线模型。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Observations on substrate characterisation through Coplanar Transmission Line Impedance measurements
In the course of developing a GaAs Schottky diode membrane technology for millimeter wave applications (viz. THz mixers and multipliers) it was found that subtle changes and variations introduced into the membrane structure can significantly affect the circuit performance. We describe how these effects manifest themselves and, using S-parameter measurements on a variety of substrates, show how they can be explained in terms of conductive or charge layers that are observable through Coplanar Transmission Line Impedance measurements. A modified transmission line model is given.
求助全文
通过发布文献求助,成功后即可免费获取论文全文。 去求助
来源期刊
自引率
0.00%
发文量
0
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
确定
请完成安全验证×
copy
已复制链接
快去分享给好友吧!
我知道了
右上角分享
点击右上角分享
0
联系我们:info@booksci.cn Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。 Copyright © 2023 布克学术 All rights reserved.
京ICP备2023020795号-1
ghs 京公网安备 11010802042870号
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术官方微信