Proceedings of the 2015 International Conference on Microelectronic Test Structures

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Proceedings of the 2015 International Conference on Microelectronic Test Structures - 最新文献

Compact modeling solution of layout dependent effect for FinFET technology

Pub Date : 2015-03-23 DOI: 10.1109/ICMTS.2015.7106119 David Chen, G. Lin, Tien Hua Lee, Ryan Lee, Y. C. Liu, Meng Fan Wang, Yi Ching Cheng, D. Y. Wu

Cross-correlation of electrical measurements via physics-based device simulations: Linking electrical and structural characteristics

Pub Date : 2015-03-23 DOI: 10.1109/ICMTS.2015.7106117 A. Padovani, L. Larcher, L. Vandelli, M. Bertocchi, R. Cavicchioli, D. Veksler, G. Bersuker

Accelerating 14nm device learning and yield ramp using parallel test structures as part of a new inline parametric test strategy

Pub Date : 2015-03-23 DOI: 10.1109/ICMTS.2015.7106106 Garry Moore, J. Liao, Scott McDade, B. Verzi

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