捕集剂:用于封装的微分子清除剂[MEMS]

Proceedings International Symposium on Advanced Packaging Materials Processes, Properties and Interfaces (IEEE Cat. No.01TH8562) Pub Date : 2001-03-11 DOI:10.1109/ISAOM.2001.916575

M. Previti, K. Gilleo

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引用次数: 4

摘要

在过去的一年中，MEMS已经成为一项非常引人注目的技术，但有许多问题需要经济的技术解决方案。getter将在MEMS和MOEMS封装中发挥关键作用。双重用途的水分-颗粒吸湿器看起来很理想，并且已经在一些光学MEMS商业产品中使用。在这方面必须做更多的工作，特别是准密封包装。吸气剂可以使成本较低的包装，如粘合剂密封或甚至塑料包装成为可能。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Getters: micromolecular scavengers for packaging [MEMS]

MEMS has become a very high profile technology during the past year, but there are a host of issues that require economical technical solutions. Getters will play a key role in MEMS and MOEMS packaging. Dual-purpose moisture-particle getters appear ideal and are already used in some optical MEMS commercial products. More work must be done in this area, especially for quasi-hermetic packaging. A getter may enable lower cost packaging such as adhesive sealing or even plastic packaging.

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Proceedings International Symposium on Advanced Packaging Materials Processes, Properties and Interfaces (IEEE Cat. No.01TH8562)

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