微加工可调弯曲刚度装置

Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308) Pub Date : 2000-01-23 DOI:10.1109/MEMSYS.2000.838484

O. Tabata, S. Konishi, P. Cusin, Y. Ito, F. Kawai, S. Hirai, S. Kawamura

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引用次数: 24

摘要

本文报道了一种利用微细加工技术实现的弯曲刚度可调装置。基于新提出的原理，制作了两种弯曲刚度分别由静电力和气动控制的装置。通过分析和实验，验证了所提原理的可行性，并对样机的性能进行了验证。

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Microfabricated tunable bending stiffness device

This paper reports a device with tunable bending stiffness realized by microfabrication technology. Based on the newly proposed principles, two types of devices whose bending stiffness were controlled by electrostatic force and pneumatic force were fabricated. From the analysis and experiments, the feasibility of the proposed principles were confirmed and the performances of the prototyped devices were demonstrated.

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来源期刊

Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308)

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