用于智能电源母线ESD保护的热载波触发可控硅

J. Watt, A. Walker
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引用次数: 14

摘要

研制了一种用于电力母线静电放电保护的热载体触发可控硅(HCTSCR)。由n沟道场效应管中的热电子产生的衬底电流用于在ESD事件期间锁存连接在电源总线之间的可控硅结构。触发电路用于控制热载流子的产生,从而在ESD的快速电压斜坡特性期间降低HCTSCR的导通电压。通过调节触发场效应管的栅极长度,可以精确地调节HCTSCR的导通电压。HCTSCR已在0.5 /spl mu/m CMOS SRAM技术中实现,并已被证明可以提供超过8800 V的HBM ESD保护,而不会降低锁存。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
A hot-carrier triggered SCR for smart power bus ESD protection
A hot-carrier triggered SCR (HCTSCR) has been developed for power bus electrostatic discharge (ESD) protection. Substrate current generated by hot electrons in an n-channel FET is used to latch an SCR structure connected between the power buses during an ESD event. A trigger circuit is used to control the hot-carrier generation such that the turn-on voltage of the HCTSCR is reduced during the fast voltage ramp characteristic of ESD. The turn-on voltage of the HCTSCR can be accurately tuned by adjusting the gate length of the trigger FET. The HCTSCR has been implemented in a 0.5 /spl mu/m CMOS SRAM technology and has been demonstrated to provide protection against HBM ESD in excess of 8800 V without any degradation in latch-up.
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