建立Cu-EMC界面在恶劣条件下的界面断裂特性

M. Sadeghinia, K. Jansen, L. Ernst, H. Pape
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引用次数: 1

摘要

界面分层是微电子产品的失效模式之一。为了能够判断界面断裂的危险性,需要建立临界界面断裂特性。湿度、温度和模态混合对界面韧性有显著影响。处理水分效应时,最高温度限制在100℃。这一限制很大程度上限制了所获得的临界断裂数据在微电子封装可靠性研究中的应用。这是因为对于预保湿微电子封装,界面分层失效经常发生在该温度极限以上。本文的研究重点是在压力蒸汽条件下(温度大于100℃,相对湿度为100%)建立环氧成型复合材料-铜引线框的临界界面断裂性能。为此,设计开发了专用的蒸汽室。通过安装CCD摄像机来跟踪裂纹沿界面的扩展,完成了安装。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Establishing the interfacial fracture properties of Cu-EMC interfaces at harsh condition
Delamination in interfaces is one of the failure modes in microelectronic products. In order to be able for judging the risk of interface fracture, the critical interfacial fracture properties should be established. Moisture, temperature and mode mixity have significant effect on the interfacial toughness. Dealing with the moisture effect the highest temperature was limited to 100°C. This limitation is quite restrictive for the application of the obtained critical fracture data for reliability studies of microelectronic packages. This is because of the fact that for pre-moisturized microelectronic packages the interface delamination failure often occurs above this temperature limit. The present research focused on the establishing the critical interfacial fracture properties of epoxy molding compound-copper leadframes in the pressurized steam condition i.e. temperature larger than 100°C and 100% RH. Dealing with it, a special steam chamber is designed and developed. The setup is completed by installing a CCD camera for tracking the crack growth along the interface.
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