圆片制造过程中现代线锯细线的自由振动分析

S. Wei, I. Kao
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引用次数: 0

摘要

在线锯制造过程中,高速移动的细线被推到铸锭上生产晶圆片,线锯在进入铸锭时受到两个晶圆壁的约束。在本文中,我们研究了这种金属丝在晶圆壁约束下的振动。为了解决这一问题,建立了考虑冲击晶圆壁的金属丝振动模型。采用伽辽金方法对运动方程进行离散化。利用冲量和动量原理来解决冲击问题。分析和仿真结果表明,在点向正弦激励下,由于受到冲击的激励,系统的响应相对于水平轴既不是周期性的,也不是对称的。晶圆壁约束对金属丝的振动特性影响很大。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Free Vibration Analysis for Thin Wire of Modern Wiresaw Between Sliced Wafers in Wafer Manufacturing Processes
In wiresaw manufacturing process where thin wire moving at high speed is pushed onto ingot to produce slices of wafer, the wire is constrained by two wafer walls as it slices into the ingot. In this paper, we investigate the vibration of such wire under the constraints of wafer walls. To address this problem, the model for wire vibration with impact to wafer walls is developed. The equation of motion is discretized using the Galerkin’s method. The principle of impulse and momentum is utilized to solve the impact problem. The results of analysis and simulation indicate that the response under a pointwise sinusoidal excitation is neither periodical nor symmetric with respect to the horizontal axis, due to the excitation from the impact. The wire vibration behavior is affected dramatically by the wafer wall constraints.
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