顶电极对超声微传感器MEMS压电膜片脉冲响应振动模式的影响

2016 IEEE International Meeting for Future of Electron Devices, Kansai (IMFEDK) Pub Date : 2016-06-23 DOI:10.1109/IMFEDK.2016.7521705

Tomoki Nishioka, Taiki Nishiumi, K. Yamashita, M. Noda

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引用次数: 0

摘要

从压电超声微传感器的顶电极对机载超声脉冲振动的影响角度，研究了压电超声微传感器中MEMS膜片的振动模式。传感器的上电极分为超声传感和谐振频率调谐两部分，利用它们实现使用两个谐振频率的高分辨率测量技术。采用扫描式激光多普勒振动仪对不同厚度的分体电极传感器隔膜的振动模式进行了分析。顶部电极对振动模式的影响很大，即使在厚度约为10 nm时也是如此，并且发现具有顶部电极的隔膜的两个振动峰对高分辨率测量有用。

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Influence of top electrodes to vibration modes in impulse responses of MEMS piezoelectric diaphragms for ultrasonic microsensors

Vibration modes of MEMS diaphragms were investigated in piezoelectric ultrasonic microsensors from the viewpoint of how their top electrodes affect the vibrations caused by an airborne ultrasound pulse. The top electrode of the sensors is divided into two parts for ultrasonic sensing and resonant frequency tuning to utilize them for a high resolution measurement technique which uses two resonant frequencies. The vibration modes of the sensor diaphragms having the divided electrode with various thickness were evaluated using scanning laser Doppler vibrometry. The top electrode strongly affected the vibration mode even in the thickness around 10 nm and two vibration peaks of the diaphragms having the top electrode were found to be useful for the high resolution measurement.

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来源期刊

2016 IEEE International Meeting for Future of Electron Devices, Kansai (IMFEDK)

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