从不同pn结的EOFM模拟和测量中获得新的激光电压信号

2018 IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA) Pub Date : 2018-07-01 DOI:10.1109/IPFA.2018.8452174

I. Vogt, R. Leihkauf, T. Nakamura, C. Boit

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引用次数: 1

摘要

我们在不同的pn结上给出了不同的电光频率映射(EOFM)模拟和实验结果。结果对现代ic中存在的EOFM信号原因(也包括寄生)提供了详细的见解，超过350个EOFM模拟绘制了EOFM信号依赖于温度，掺杂水平，电压和激光带宽的精确定量图。对反射激光的额外分析允许根据衬底厚度和干涉模式估计和改进EOFM信号质量。

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New Laser Voltage Signal Insights from EOFM Simulations and Measurements on different pn-junctions

We present various results of electro-optical frequency mapping (EOFM) simulations and experiments on different pn-junctions. The results give detailed insight into EOFM signal causes (also parasitic) present in modern ICs, Over 350 EOFM simulations draw a precise quantitative picture of EOFM signal dependence on temperature, doping levels, voltage and laser bandwidth. Additional analysis of the reflected laser-light allows for an estimation and improvement of EOFM signal quality dependent on substrate thickness and interference pattern.

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2018 IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA)

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