先进晶圆级封装技术的可靠性挑战与改进

S. Yoon
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引用次数: 5

摘要

自1998年推出以来,用于半导体封装的WLCSP(晶圆级封装)的数量经历了显着增长。这一增长主要是由移动消费产品推动的,因为它具有小尺寸和高性能的封装设计。它对WE(可穿戴电子产品)和IoT(物联网)产品也很有吸引力。虽然WLCSP现在是一种被广泛接受的封装选项,但WLCSP最初的接受程度受到SMT组装工艺和封装设计中固有的暴露硅的脆弱性的限制。自引进包装以来,装配技能和方法得到了改进;然而,对硅的损坏仍然是一个问题。在晶圆片切割后,晶圆片的侧面或顶部继续暴露,硅在组装过程中继续面临碎裂,开裂和其他处理损坏的风险。本文介绍了eWLB(嵌入式晶圆级球栅阵列)/FO-WLP (fanout-WLP)和eWLCSP(封装式WLCSP),以提高可靠性[1]。在这些新型封装中,EMC应用于芯片上所有暴露的硅表面。制造工艺利用现有的大批量制造方法,具有极高的工艺产量。eWLB是FO-WLP的一种,有可能在晶圆节点技术的任何收缩阶段实现任意数量的标准间距互连。对于eWLCSP,涂层可以保护硅和易碎的电介质,防止在切割和组装过程中损坏,有效地提供了一个封装部件。在制造过程中,产品晶片首先被削薄和切丁。然后将模具重新组装成晶圆形式,并使用标准方法应用电介质,薄膜金属和焊料凸起。所得到的结构与传统的WLCSP产品相同,除了保护侧壁涂层。本文从元件级和板级(板上温度循环和板上温度下降)两方面讨论了可靠性的提高。将介绍新包的关键属性以及用于创建它的制造过程。研究了试验可靠性数据和失效模式,并与常规WLCSP产品进行了比较。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Challenges and improvement of reliability in advanced wafer level packaging technology
The number of WLCSP (Wafer Level Packages) used in semiconductor packaging has experienced significant growth since its introduction in 1998. The growth has been driven primarily by mobile consumer products because of the small form factor and high performance enabled in the package design. And it is also attractive to WE (wearable electronics) and IoT (Internet of Things) products. Although WLCSP is now a widely accepted package option, the initial acceptance of WLCSP was limited by concerns with the SMT assembly process and the fragile nature of the exposed silicon inherent in the package design. Assembly skills and methods have improved since the introduction of the package; however, damage to the silicon remains a concern. The side or top of the die continue to be exposed after dicing the wafer and the silicon continues to be at risk for chipping, cracking, and other handling damage during the assembly process. This paper introduces eWLB (embedded Wafer Level Ball Grid Array) /FO-WLP (fanout-WLP) and eWLCSP (encapsulated WLCSP) for its improved and advanced reliability [1], In these new packages EMC is applied to all exposed silicon surfaces on the die. The manufacturing process leverages existing high volume manufacturing methods with exceptionally high process yields. eWLB is a type of FO-WLP that has the potential to realize any number of interconnects with standard pitches at any shrink stage of the wafer node technology. For eWLCSP, the applied coating protects the silicon and fragile dielectrics to prevent handling damage during dicing and assembly operations, effectively providing a packaged part in the form factor of a WLCSP. In manufacturing process, the product wafer is thinned and diced first. The dies are then reconstituted into a wafer form and standard methods are used to apply dielectrics, thin film metals, and solder bumps. The resulting structure is identical to conventional WLCSP products with the exception of the protective sidewall coating. This paper discusses the improvement of reliability, both component level and board level (drop and Temperature Cycle on Board). The key attributes of the new package as well as the manufacturing process used to create it are to be presented. Experimental reliability data and failure mode are studied and compared to conventional WLCSP products.
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