手指金属结构用OBIRCH的电压选择

2016 IEEE 23rd International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA) Pub Date : 2016-07-18 DOI:10.1109/IPFA.2016.7564235

LinMeng Yang, Bobby Chan, G. Qian, Li-Lung Lai, Rui Fang

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引用次数: 1

摘要

OBIRCH作为一种缺陷定位工具，被广泛应用于解决FAB的低良率问题。选择合适的电压对OBIRCH的有效工作至关重要。本文提出了一种用于手指金属结构的OBIRCH临界电压分析方法。根据电流和电压的测量数据，模拟了计算电流比较差的经验公式。三种情况表明，当σ达到最大值时，出现了适当的电压。实验证明，该方法可以有效地为OBIRCH选择合适的工作电压。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Voltage choosing of OBIRCH for finger metal structure

As a tool to localize defects, OBIRCH is widely used in solving the problem of FAB low yield issue. Choosing a proper voltage is critical for the effective working of OBIRCH. This paper proposes a method to analyze the critical voltage of OBIRCH used to the finger metal structure. Based on the measurement data including current and voltage, an empirical formula has been simulated to calculate Sigma (current comparative difference). Three cases show proper voltage arises while the Sigma had the maximum value. It is proved that the method proposed is effective to choose a correct voltage for the working of OBIRCH.

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2016 IEEE 23rd International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA)

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