微波晶体管可靠性研究

D. Lacombe, R. Naster, J. Carroll
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引用次数: 1

摘要

对采用不同金属化系统的微波晶体管进行了一系列射频工作寿命测试,以评估失效机制并比较器件的预期寿命。最初的一系列高温连续试验表明,铝金属化器件在225°C下工作2000小时后失效,主要是由于电迁移导致发射极手指出现空洞。金金属化晶体管被发现能够在非常高的温度下(340°C时2000小时)长寿命。在相同的设备上,在接近工作温度下进行了一系列长期脉冲寿命试验。结果证实了基于连续波试验的铝器件寿命预测,但失效机理有所不同。由于发射器-基地分流机制(电迁移的另一种表现),器件失效。难熔金属/金金属化器件失效的原因是金属剥落,这是一个与工艺有关的问题。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
A Study of the Reliability of Microwave Transistors
A series of RF operating life tests has been performed on microwave transistors with different metallization systems to evaluate failure mechanisms and compare the lifetimes expected from the devices. An initial series of high temperature CW tests indicated that aluminum metallized devices fail after 2000h at 225°C, primarily due to voids in the emitter fingers caused by electromigration. Gold metallized transistors were found to be capable of long life at very high temperatures (2000 h at 340°C). A series of long-term pulsed life tests was performed at near operational temperatures on the same devices. The results confirmed the lifetime prediction for the aluminum devices based on the CW tests, but the failure mechanisms were somewhat different. The devices failed due to an emitter-base shunting mechanism, another manifestation of electromigration. The refractory metal/gold metallized devices failed because of metal peeling, a process related problem.
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