无成形HfO2双极RRAM器件,提高了耐用性和高速运行

Yu-Sheng Chen, T. Wu, P. Tzeng, Pang-Shiu Chen, Heng-Yuan Lee, Cha-Hsin Lin, Frederick T. Chen, M. Tsai
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引用次数: 38

摘要

用HfO2薄膜制备了TiN/Ti/HfO2/TiN的无形成电阻存储器。制造后的装置无需额外的成形步骤即可启动操作。该双极工作模式器件具有高速(~ 10ns)、耐用性(~ 106倍)、数据保留性好(10年寿命)、电阻比高、功耗低等特点。简单的结构和多层次的操作能力证明了RRAM在不久的将来是一种高密度存储器。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Forming-free HfO2 bipolar RRAM device with improved endurance and high speed operation
A forming-free resistive memory of TiN/Ti/HfO2/TiN with a thin HfO2 film is demonstrated. The as-fabricated device can be operated without additional forming step to initiate the operation. This device with bipolar operation mode shows high speed (∼ 10 ns), robust endurance (≫ 106 times), good data retention (10-year lifetime), enough resistance ratio, and low power consumption. The simple structure and capability of multi-level operation demonstrate RRAM as a high-density memory in the near future.
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