同步x射线显微衍射研究了锡在电迁移过程中的微观结构演变

A. Wu, J. Lloyd, N. Tamura, K. Tu
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引用次数: 1

摘要

在恒流电迁移条件下,白锡(P-Sn)的电阻下降幅度可达10%。它具有体心四边形(BCT)结构,沿a、b轴的电阻率比沿c轴的电阻率小35%。电迁移过程中微观结构的演变是导致电阻下降的主要原因。用同步辐射白束x射线微衍射研究了这一演化过程。对应力和晶粒取向进行了研究。通过对移地和原位样品电迁移过程中晶粒取向变化的衍射Laue图进行逐粒分析。我们观察到,高电阻晶粒相对于邻近的低电阻晶粒重新定向,最有可能是后者的晶粒旋转。提出并讨论了电迁移作用下的微观组织演化机制。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Microstructure evolution of tin under electromigration studied by synchrotron X-ray micro-diffraction
Under constant current electromigration, white tin (P-Sn) exhibited a resistance drop of up to 10%. It has a body-center tetragonal (BCT) structure, and the resistivity along the a and b axes is 35% smaller than that along the c axis. Microstructure evolution under electromigration could be responsible for the resistance drop. Synchrotron radiation white beam X-ray microdiffraction was used to study this evolution. Both stress and grain orientation was studied. Grain-by-grain analysis was obtained from the diffracted Laue patterns about the changes of grain orientation during electromigration testing in ex-situ and in-situ samples. We observed that high resistance grains re-orient with respect to the neighboring low resistance grains, most likely by grain rotation of the latter. A different mechanism of microstructure evolution under electromigration from the normal grain growth is proposed and discussed.
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