激光焊球喷射对焊球附着工艺的评价

M. Ding, L. Wai, Shiyun Zhang, V. S. Rao
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引用次数: 8

摘要

由于微电子工业对小型化和更好性能的不断推动,电子封装上的输入/输出计数密度在给定区域内成倍增加。传统的基于焊剂的焊锡球附着工艺在满足光电和微机电系统(MEMS)封装中更严格的节距公差和组装挑战方面正迅速达到瓶颈。为了满足新的封装要求,开发了一种新的无焊剂激光焊接球喷射技术。尽管激光焊球喷射可以提供各种优点,但尚未广泛报道。采用120μm SAC305焊接球,实现了200μm间距激光焊接球喷射。通过高温储存(1250℃,24小时,500小时和1000小时)和多次回流(5次和10次),评估了激光喷射凸点的可靠性,并将其与基于通量的回流凸点进行了比较。通过焊锡球剪切试验、横截面、能量色散x射线(EDX)光谱分析和扫描电子显微镜(SEM)成像,对焊点的质量和可靠性进行了量化。从我们的研究结果来看,激光喷射凸起的初始平均剪切强度很高,为10.70g/mil2, 24小时后最终降低到6.96g/mil2。经过1000 h热老化和10次再流处理后,激光喷射凹凸块与基于熔剂的再流凹凸块的平均抗剪强度值持续升高,IMC厚度测量值不断降低。因此,激光焊接球喷射已被证明是一种有吸引力的替代焊接球连接方法,用于强大和可靠的焊接互连。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Evaluation of laser solder ball jetting for solder ball attachment process
Due to the perpetual push in microelectronic industry for miniaturization and better performance, the density of input/output counts on the electronic packages is multiplying within a given area. Conventional flux-based solder ball attachment process is fast reaching its bottleneck in satisfying the more restrictive pitch tolerances, and assembling challenges in optoelectronics and micro-electromechanical systems (MEMS) packages. To meet the new packaging requirements, a new flux-less laser solder ball jetting technology has been developed. Despite the various advantages which laser solder ball jetting can offer, it has not been extensively reported. In this paper, fine pitch laser solder ball jetting at 200μm pitch was demonstrated using 120μm SAC305 solder spheres. The reliability of the laser jetted bumps was evaluated and compared against the flux-based reflowed bumps, by subjecting the bumps under high temperature storage (1250C for 24hrs, 500hrs and 1000 hrs) and multiple reflow (5 and 10 times). The quality and reliability of the solder joints were quantified through the solder ball shear test, cross-sectioning, energy dispersive x-ray (EDX) spectroscopy analysis and scanning electron microscopy (SEM) imaging. From our results, laser jetted bumps showed high initial average shear strength of 10.70g/mil2, which eventually decreased to 6.96g/mil2 after 24 hours. Comparing the laser jetted bumps against the flux-based reflowed bumps after 1000 hours of thermal aging and 10 times of reflow, the average shear strength values were persistently higher and the measurements of the IMC thickness were constantly lower. Hence, laser solder ball jetting has proven to be an attractive and alternative solder ball attachment method for strong and reliable solder interconnections.
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