成分对锗锑硫薄膜折射率色散的影响

1998 International Semiconductor Conference. CAS'98 Proceedings (Cat. No.98TH8351) Pub Date : 1998-10-06 DOI:10.1109/SMICND.1998.732296

V. Pamukchieva, A. Szekeres, P. Sharlandjiev, Z. Alexia, M. Gartner

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引用次数: 1

摘要

采用分光光度法在0.5 ~ 2.5 /spl μ m波长范围内研究了Ge/sub x/Sb/sub 40-x/S/sub 60/ /薄膜。折射率值由透射光谱确定。色散参数E/sub 0/和E/sub d/用平均配位数Z来评价和考虑。在Z=2.65 ~ 2.67附近，组分依赖表现出一种特性，这与薄膜结构的拓扑相变有关。

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Effect of composition on refractive index dispersion in Ge-Sb-S thin films

Ge/sub x/Sb/sub 40-x/S/sub 60/ thin films are studied by means of spectrophotometry in the light wavelength region of 0.5-2.5 /spl mu/m. The refractive index value were determined from the transmission spectra. The dispersion parameters E/sub 0/ and E/sub d/ were evaluated and considered in term of the average coordination number Z. The compositional dependences exhibit a peculiarity around Z=2.65-2.67 which can be connected with a topological phase transition of the film structure.

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来源期刊

1998 International Semiconductor Conference. CAS'98 Proceedings (Cat. No.98TH8351)

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