影响等离子印刷铜结构重丝结合力的因素评价

C. Kaestle, T. Losch, J. Franke
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引用次数: 5

摘要

功率半导体器件和系统使电能的有效转换和管理成为可能。电力电子的应用范围从几瓦到几兆瓦和千兆瓦。在社会不断电气化的推动下,电力电子产品不仅出现在汽车和能源领域,还出现在工业和照明应用以及消费电子产品中。在电力电子器件中,线键合因其高工艺稳定性和低生产成本而成为主流的顶级互连技术。其特点是具有很大的工艺灵活性,如果线键合被证明能够连接构成增材功能化甚至三维功率器件布局基础的印刷层,它也可能成为未来增材制造器件和结构的主要互连技术。因此,本文将展示冷活性大气等离子体打印与大线材铝键合工艺结合的影响因素,以及带来的可能性和挑战。为了进行研究,在Al2O3陶瓷衬底上添加了铜层。从打印参数出发,推导出了对打印层影响最大的特性。讨论了磨削和清洗等后处理各步骤的影响和效果。最后,在生成的铜层上粘接300 μm铝丝。通过破坏性拉剪试验和金相断面对工艺稳定性和互连质量进行了评价。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Evaluation of influencing factors on the heavy wire bondability of plasma printed copper structures
Power semiconductor devices and systems enable the efficient conversion and management of electrical energy. Power electronic applications range from fewer watts up to several mega- and gigawatts. Driven by a continuous electrification of society, power electronics are not only found in the automotive and energy sector, but also in industrial and lighting applications, as well as consumer electronics. In power electronic devices wire bonding is the established and predominant top-level interconnect technology due to a high process stability and low production costs. Characterized by a great process flexibility it might also be the predominant interconnection technology of coming additive manufactured devices and structures if wire bonding proves to be capable of connecting printed layers that form the basis of additive functionalized and even three-dimensional power device layouts. This paper will therefore display the influencing factors, as well as the possibilities and challenges that come along with the process combination of cold active atmospheric plasma printing with large wire aluminum bonding. For the investigations, copper layers are additively printed on Al2O3 ceramic substrates. Based on the printing parameters the most influential characteristics of the printed layers are derived. The influence and effectiveness of various steps of post processing such as grinding and cleaning are discussed. Last, a production series of 300 μm aluminum wires is bonded on the generated copper layers. The process stability as well as the interconnection quality is evaluated by destructive pull and shear tests and metallographic cross sections.
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