改进的传输线脉冲系统和用于ESD研究的晶体管测试结构

R. Ashton
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引用次数: 15

摘要

提出了一种改进的传输线脉冲系统,用于大电流下晶体管的ESD性能预测和理解,既可以对器件进行应力测量,也可以测量损坏。提出并演示了PMOS晶体管的晶体管测试结构设计指南。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Modified transmission line pulse system and transistor test structures for the study of ESD
A modified Transmission Line Pulsing System for characterizing transistors under high currents for ESD performance prediction and understanding is presented which can both stress devices and measure damage. Guidelines for transistor test structure design for use with the system are presented and demonstrated for PMOS transistors.
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