热载流子注入下PMOS晶体管失态泄漏的退化

C.H.J. Huang, T. Rost, J. McPherson
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引用次数: 3

摘要

本研究研究了埋沟道和表面沟道器件的失态泄漏电流和穿通电压随沟道热载子应力的衰减。在整个应力过程中,还监测了一些其他参数,如Idlin、Idsat、Vt和Gm;然而,非稳态泄漏电流衰减最快。泄漏电流大于三个数量级的变化可以由热载流子引起,同时穿孔电压大幅降低。由于失态泄漏具有很强的温度依赖性,因此在结温接近100/spl℃时,这些影响会变得特别严重。热载流子温度依赖性的活化能约为-0.2 eV。退化率模型表明,与最大栅极电流呈简单的幂律关系,指数为2。结果表明,采用LDD结构可以提高pMOS晶体管的热载流子鲁棒性。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Degradation of off-state leakage in PMOS transistors under hot carrier injection
This research investigates the degradation of the off-state leakage current and punchthrough voltage as a function of channel hot carrier stress for buried-channel as well as surface-channel devices. A number of additional parameters such as Idlin, Idsat, Vt, and Gm were also monitored throughout the stress; however, the off-state leakage current degraded the fastest. Changes in leakage current of greater than three orders of magnitude can be hot carrier induced combined with a substantial reduction in punchthrough voltage. Since the off-state leakage has a strong temperature dependence, these effects can become particularly severe at junction temperatures approaching 100/spl deg/C. The activation energy of the hot carrier temperature dependence was calculated to be about -0.2 eV. Degradation rate modeling indicated a simple power law dependence on maximum gate current with an exponent of 2. It was shown that hot carrier robustness could be improved in pMOS transistors by implementing an LDD structure.
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