厚栅极氧化物亚微米40V LDMOS晶体管的热载流子可靠性

J.F. Chen, Kuo-Ming Wu, Kaung-Wan Lin, Y. Su, S. Hsu
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引用次数: 33

摘要

首次提出了厚栅氧化LDMOS晶体管的热载流子可靠性,发现了两种不同的行为。首先,由于柯克效应,较高的V/sub / gs/应力导致更大的降解。其次,由于退化的恢复,交流寿命比直流寿命长得多。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Hot-carrier reliability in submicrometer 40V LDMOS transistors with thick gate oxide
The hot-carrier reliability in thick gate oxide LDMOS transistors is presented for the first time and two distinct behaviors are found. First, higher V/sub gs/ stressing results in a greater degradation because of the Kirk effect. Second, AC lifetime is much longer than DC lifetime because of the recovery in degradation.
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