太阳能电池用光学薄膜涂层制备ITO的性能研究

2020 IEEE 5th International Conference on Integrated Circuits and Microsystems (ICICM) Pub Date : 2020-10-23 DOI:10.1109/ICICM50929.2020.9292192

Dai Pan, Cheng Feixue, Long Jun-hua, Lu Shulong

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引用次数: 2

摘要

我们研究了用光学薄膜涂层制备的ITO的晶体质量和光学性能，以取代传统的金属电极作为III-V型太阳能电池的电极。在玻璃、砷化镓和硅衬底上生长了ITO薄膜。ITO是一种以222晶面为主的多晶。表面光滑，纳米晶突出。ITO的透光率与厚度和退火温度有密切的关系。经500℃退火后，透光率明显提高。随着厚度的增加，透光率总体呈下降趋势。通过外推Tauc曲线的线性部分与能量轴的截距，估计ITO薄膜的带隙为3.8 eV。测量了ITO薄膜的折射率n。反射率受ITO厚度的影响很大。

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The Property of ITO Produced by Optical Thin Film Coating for Solar Cell

We studied the crystal quality and optical properties of ITO produced with optical thin film coatings to replace conventional metal electrodes as electrodes for III-V solar cells. ITO films were grown on glass, GaAs and silicon substrate. ITO is a polycrystalline with predominant (222) crystalline plane. A smooth surface with protruding nano-crystallite was observed. The light transmittance of ITO has a strong relationship with thickness and annealing temperature. The transmittance was obviously enhanced after being annealed at 500 °C. With the thickness increase, the transmittance decreases in total. The band gap of the ITO film was estimated 3.8 eV by extrapolating the linear part of the Tauc plot curves to intercept the energy axis. The refractive index n of ITO film is was measured. The reflectivity is greatly influenced by the thickness of ITO.

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2020 IEEE 5th International Conference on Integrated Circuits and Microsystems (ICICM)

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