利用DOE和析因分析技术设计双层WLCSP

Chang-Chun Lee, Shu-Ming Chang, K. Chiang
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引用次数: 4

摘要

具有高I/O计数和更复杂的半导体器件的更新,更快和更小的电子封装方法正在稳步快速地出现。晶圆级芯片缩放封装(WLCSP)在未来的电子封装中具有很高的潜力。然而,对于尺寸约为100mm /sup / /的大芯片,无衬底填充的焊点可靠性仍然是一个迫切需要解决的问题。为此,为了提高焊点的疲劳寿命,本研究提出了一种具有应力柔性层和虚拟焊点的双层WLCSP (DL-WLCSP)。为了保证分析方法的有效性,通过Rambus DRAM测试车验证了DL-WLCSP的适用性和可靠性。实验测试的热循环结果与模拟分析结果吻合较好。此外,为了研究焊料体积、模侧和基板侧焊盘直径布置、节距、柔性层厚度、模具厚度和印刷电路板厚度等设计参数对可靠性的影响,采用实验设计(DOE)结合析因分析的方法,通过三维非线性有限元模型(FEM)获得各参数的灵敏度信息。方差分析的统计结果表明,应力柔顺层的厚度和焊点的体积可以有效地减小焊点外角周围的应力集中现象。此外,还可以得到设计参数之间明显的交互作用。通过更好地结合几何设计参数,可以实现较小的热应变,从而在制造前提供实际需要的物理信息。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Design of double layer WLCSP using DOE with factorial analysis technology
Newer, faster and smaller electronic packaging approaches with high I/O counts and more complex semiconductor devices are emerging steadily and rapidly. Wafer level chip scaling package (WLCSP) has a high potential for future electronic packaging. However, the solder joint reliability for a large chip size of about 100 mm/sup 2/ without underfill is remains a troubling issue that urgently requires a solution. To this end, a double-layer WLCSP (DL-WLCSP) with stress compliant layer and dummy solder joint is proposed in this research in order to enhance the solder joint fatigue life. To ensure the validity of the analysis methodology, a test vehicle of Rambus DRAM is implemented to demonstrate the applicability and reliability of the proposed DL-WLCSP. The results of the thermal cycling in the experimental test show good agreement with the simulated analysis. Furthermore, to investigate the reliability impact of the design parameters, including solder volume, the arrangement of the die-side and substrate-side pad diameter, pitch, compliant layer thickness, die thickness, and the printed circuit board (PCB) thickness, a design of experiment (DOE) with factorial analysis is adopted to obtain the sensitivity information of each parameter by the three-dimensional nonlinear finite element models (FEM). The statistics results of the analysis of variance reveal that the thickness of the stress compliant layer and the volume of the solder joint can effectively reduce the stress concentration phenomenon, which occurs around the outer-corner of the solder joint. In addition, the evident interaction between design parameters can also be obtained. The smaller thermal strains can be achieved through a better combination of design parameters of the geometry so as to provide the actual requirement of the physical information prior to manufacturing.
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