H. Mizuta, M. García-Ramírez, Z. Moktadir, Y. Tsuchiya, S. Sawai, J. Ogi, S. Oda
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This paper overviews recent attempts at co-integrating nano-electro-mechanical systems (NEMS) with nanoelectronic devices aiming to add more functionalities to conventional Si devices in ‘More-than-Moore’ domain and also explore novel physical principles in ‘Beyond CMOS’ domain.
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