可靠性基本规则在<50 /spl mu/m间距时改变

I. Singh, L. Levine, J. Brunner
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引用次数: 4

摘要

一种新的40 /spl / mu/m螺距的线键合工艺需要进行重大的工艺改进和评估,以证明工艺的能力和可靠性。最近,为了在这种螺距下使用最大直径的线实现高成品率,球键的形貌发生了变化,这改变了高质量键的失效模式。对于新开发的高强度焊丝来说,长期时效是一项关键任务。失败标准和测试需求的选择是成功的关键。这些必须保证长期的可靠性,也必须反映现实。在探针键合垫上进行超细间距键合对工艺收率和金属间形成有显著影响。在矩形键合垫内分离探针和导线键合放置的器件设计是优选的。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Reliability ground rules change at <50 /spl mu/m pitch
Qualification of a new 40 /spl mu/m pitch wire bonding process requires significant process improvements and evaluations demonstrating process capability and reliability. Recent changes in the morphology of the ball bond, required to achieve high yield manufacturing with the largest diameter wire possible at this pitch, have changed the failure mode for high quality bonds. With newly developed high-strength bonding wire long-term aging is a critical task. Choice of failure criteria and test requirements are critical to success. These must assure long-term reliability and must also reflect reality. Ultra-fine pitch bonding on probed bond pads can significantly effect process yields and intermetallic formation. Device designs that separate probe and wire bond placement within a rectangular bond pad are preferred.
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