深n阱植入对片上系统集成中衬底噪声耦合和射频晶体管性能的影响

K. Chew, J. Zhang, K. Shao, W. Loh, S. Chu
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引用次数: 17

摘要

本文综述了将深n阱植入到最新CMOS技术中的优点,以解决集成电路中的混合模式耦合问题。深n井结构,加上新颖的体偏置技术和p+保护环的使用,在100 MHz时,衬底噪声最大降低了35 dB。此外,深n阱注入不会影响多指晶体管的直流、交流、射频和噪声性能,从而使模型与标准井型多指晶体管保持一致。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Impact of Deep N-well Implantation on Substrate Noise Coupling and RF Transistor Performance for Systems-on-a-Chip Integration
This paper reviews the merits of incorporating deep n-well implantation in state-of-the-art CMOS technologies to address mixed-mode coupling in integrated circuits. The deep n-well architecture, coupled with novel body biasing techniques and the use of p+ guard ring, have resulted in a maximum of 35 dB reduction in substrate noise at 100 MHz. Furthermore the deep n-well implantation does not impact the dc, ac, rf and noise performance of the multi-fingered transistor, hence allowing model consistency with the standard well multi-fingered transistor.
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