32nd European Solid-State Device Research Conference

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32nd European Solid-State Device Research Conference - 最新文献

On Increasing the Accuracy of Simulations of Deposition and Etching Processes Using Radiosity and the Level Set Method

Pub Date : 2002-09-24 DOI: 10.1109/ESSDERC.2002.194940 C. Heitzinger, J. Fugger, Oliver Häberlen, Siegfried Selberherr

Inversion Layer Quantization Impact on the Interpretation of 1/f Noise in Deep Submicron CMOS Transistors

Pub Date : 2002-09-24 DOI: 10.1109/ESSDERC.2002.194875 A. Mercha, E. Simoen, G. Richardson, C. Claeys

Impact of ALCVD and PVD Titanium Nitride Deposition on Metal Gate Capacitors

Pub Date : 2002-09-24 DOI: 10.1109/ESSDERC.2002.194998 G. Lujan, T. Schram, L. Pantisano, J. Hooker, S. Kubicek, E. Rohr, J. Schuhmacher, O. Kilpela, H. Sprey, S. De Gendt, K. De Meyer

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