a-SiC(O,N):H thin films-their optical properties and possible applications

In this paper we summarize briefly the research on optical properties of a-Si/sub 1-x/C/sub x/(O,N):H thin films and possible applications in devices and microsystems. Materials produced by different deposition processes are compared. Films grown from light hydrocarbons and monosilane on the one hand and films of polymerized organosilanes deposited in wet chemical on the other are described. These outer ends are set in relation to a third class of films made by plasma polymerization. These were deposited from liquid organosilanes avoiding hazardous conditions and starting materials. All three groups show promising photoluminescence and waveguiding properties, and these are discussed.