采用“自适应回流”技术改善LDMOS晶体管的SOA

P. Hower, J. Lin, S. Merchant, S. Paiva
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引用次数: 21

摘要

将实测的SOA与场隙LDMOS晶体管的仿真结果进行了比较。在场氧化物下考虑了n型“回流”或“内场”植入物的实用性。对于一个固定的VDS,存在一个最佳的场内剂量值。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Using "Adaptive resurf" to improve the SOA of LDMOS transistors
Measured SOA is compared with simulations for field gap LDMOS transistors. The utility of an n-type "resurf" or "nfield" implant under the field oxide is considered. For a fixed VDS, it is shown that there is an optimum value of nfield dose.
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