Industry study on issues of MEMS reliability and accelerated lifetime testing

The paper presents the results of an industry study on issues of reliability and accelerated life testing (ALT) for micro-electro-mechanical system (MEMS) devices. The study was conducted by the MEMS Industry Group (MIG) through surveying MEMS companies and holding working group meetings in MIG sponsored conferences participated by membership companies. The survey first established the type of MEMS companies and the categories of devices involved. It then focused on the expectation, perception and state of the respondent's product lifetime, reliability issues, failure investigation and accelerated life testing. Finally, the needs of the survey participators were addressed.