GaInAsP/SOI混合激光器的n2等离子体激活键合

2017 5th International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D) Pub Date : 2017-05-01 DOI:10.23919/LTB-3D.2017.7947425

N. Nishiyama, Y. Hayashi, Jun-ichi Suzuki, S. Arai

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引用次数: 0

摘要

阐述了GaInAsP/SOI混合激光器的n2等离子体激活键合条件和键合特性。SEM和TEM图像显示了高质量的键合界面和较小的损伤量子阱，足以实现混合激光。

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N2-plasma activated bonding for GaInAsP/SOI hybrid lasers

Bonding conditions and characteristics of N2-plasma activated bonding for GaInAsP/SOI hybrid lasers are explained. SEM and TEM images reveal high quality bonding interface and less damage quantum wells, which are enough to realize hybrid lasers.

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来源期刊

2017 5th International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D)

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