用于大批量生产的集成电路器件的细间距铜线键合工艺

S. Schindler, M. Wohnig, K. Wolter
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引用次数: 1

摘要

线键合是实现电子芯片到封装互连以及提供从基片到基片的电气路径以进行功率和信号分配的最常用技术。建立于20世纪70年代,由于多年来不断改进工艺和开发复杂的自动化设备,金属丝键合已经得到了很好的记录和研究,[1-2]。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Fine pitch Cu wire bond process for integrated circuit devices for high volume production
Wire bonding is the most applied technology to realize an electric chip-to-package interconnection and to provide electrical paths from and to the substrate for power and signal distribution. Established in the 1970s, wire bonding has been well documented and researched as a result of continuous process improvement and through the development of sophisticated, automated equipment over the years, [1-2].
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