直接芯片供电和通过各向异性导电胶粘剂芯片间键合增强近距离通信

Jing Shi, D. Popovic, N. Nettleton, T. Sze, D. Douglas, H. Thacker, J. Cunningham, K. Furuta, R. Kojima, Koichi Hirose, Kuopin Hwang
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引用次数: 3

摘要

近距离通信(PxC)技术近年来因其在低功耗、高带宽多芯片模块应用方面的潜力而备受关注。在我们之前演示的PxC MCM封装中,一个带有两个有源芯片的3芯片子组件通过桥接芯片通信,并倒装到基板上。桥式芯片和有源芯片重叠,并与硅基粘合剂面对面粘合。低引脚数桥接芯片(面朝上)依赖于键合的Au线来提供电源和低速I/ o。键合线的寄生电感限制了桥上的带宽,这激发了一种替代方法来为面朝上的桥芯片供电。在本文中,我们报道了利用各向异性导电膜(ACF)作为PxC通道之间的介电粘合剂的芯片间键合。ACF提供直接的垂直导电路径为桥接芯片供电。此外,导电颗粒的引入可以增加胶粘剂的有效介电常数,这有利于近距离通信的电容信号耦合。在索尼化学和信息设备公司,采用两阶段对准和键合/固化工艺进行了键合实验。通过SAT、SEM、EDX等物理表征研究了粘接界面的粘接线、取向和质量。利用ANSYS商用有限元求解器Q3D Extractor模拟了ACF材料内部漂浮金属颗粒对局部电容通道的影响。我们还通过孤岛芯片的边界扫描链测试测试了导电通道的连续性。初步结果表明,夹在两个芯片之间的ACF形成了均匀的无空洞键合线。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Direct chip powering and enhancement of proximity communication through Anisotropic Conductive adhesive chip-to-chip bonding
Proximity communication (PxC) technology has attracted great attention in recent years for its potential in low power, high bandwidth multi-chip module applications. In our previously demonstrated PxC MCM package, a 3-chip sub-assembly with two Active chips communicated through a Bridge chip and was flip-chip bonded to the substrate. The Bridge and Active chips overlap, and are face-to face bonded with silicone-based adhesive. The low pin count Bridge chip (face-up) relied on the bonded Au wire to deliver power and low speed I/Os. The parasitic inductance of the bondwires limited bandwidth on the Bridge, which motivated an alternative way to power the face-up Bridge chip. In this paper, we report chip-to-chip bonding using Anisotropic Conductive Film (ACF) as the dielectric adhesive between PxC channels. ACF provided direct vertical conductive path to power the Bridge chip. In addition, the introduction of conductive particles could increase the effective dielectric constant of the adhesive which benefits capacitively- signal coupling for proximity communications. The bonding experiment was carried out using a two-stage alignment and bonding/cure process at Sony Chemical & Information Device Corporation. Physical characterizations such as SAT, SEM, EDX were carried out to investigate bond line, alignment and quality of the adhesive interfaces. The effect of the floating metallic particles inside the ACF material on the local capacitive channels was simulated using a commercial FEM solver Q3D Extractor from ANSYS. We also tested conductive channel continuity through boundary scan-chain test of the Island chips. The initial results indicates that ACF sandwiched between two chips formed a uniform, void free bondline.
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