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Fabrication of SiO:CH Particle-agglomerated Films by PECVD with Vinyl-group Organosilicon Reactants

Pub Date : 2022-12-16 DOI:10.2494/photopolymer.35.283
Yuki Nakaizumi, K. Hasegawa, Yasushi Inoue, O. Takai
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以乙烯基有机硅为反应物的PECVD法制备SiO:CH颗粒团聚膜
本文章由计算机程序翻译，如有差异，请以英文原文为准。
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