A model for outgassing of organic contamination from wafer carrier boxes

Abstract

A thermal desorption apparatus has been developed to study the adsorption and desorption of organic contaminants on silicon wafers due to outgassing from plastic wafer carrier boxes. This paper describes a complete outgassing model for organic contamination based on characterization of the outgassing of organic contamination from polypropylene carrier boxes using Butylated Hydroxytoluene (BHT) as a model compound. The model was developed from experimental data for a limited set of time/temperature conditions. Verification of the model is provided by its goodness of fit over an extended set of experimental data.