Trace gas analysis by diode laser cavity ring-down spectroscopy

半导体技术 Pub Date : 2002-04-18 DOI:10.1117/12.462654

Wen-Bin Yan, C. Krusen, J. Dudek, K. Lehmann, P. Rabinowitz

引用次数: 5

Abstract

The first commercial analyzer based on cavity ringdown spectroscopy (CRDS) was developed to perform fast and reliable analysis of ultra trace gas impurities. The complete analytical system, the MTO-1000, is capable of measuring moisture from 200 parts-per-trillion (PPT) to 5 ppm. Trace moisture test data will be presented to demonstrate the speed of response, sensitivity, and accuracy of the analyzer.

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二极管激光腔衰荡光谱分析痕量气体

开发了第一台基于腔衰荡光谱(CRDS)的商用分析仪，用于快速可靠地分析超痕量气体杂质。完整的分析系统MTO-1000能够测量从200ppm到5ppm的水分。微量水分测试数据将展示的响应速度，灵敏度和准确性的分析仪。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

半导体技术

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8436