Stability of GeTe-based phase change material stack under thermal stress: Reaction with Ti studied by combined in-situ x-ray diffraction, sheet resistance and atom probe tomography

Abstract

In situ sheet resistance and x-ray diffraction measurements were used simultaneously during heat treatment to study Ti electrodes in contact with Ge-Te phase change materials. Ti is found to react with GeTe forming TiTe2 and Ge. Atom probe tomography analyses confirm the presence of these two phases after a 400°C heat treatment.