Methyl-methacrylate based aluminum hybrid film grown via three-precursor molecular layer deposition

IF 2.4 3区材料科学 Q3 MATERIALS SCIENCE, COATINGS & FILMS

Journal of Vacuum Science & Technology A Pub Date : 2022-03-01 DOI:10.1116/6.0001505

Solomon T. Oyakhire, Hayrensa Ablat, Nathaniel E. Richey, S. Bent

引用次数: 1

查看原文本刊更多论文

三前驱体分子层沉积法制备甲基丙烯酸甲酯基铝杂化膜

本文章由计算机程序翻译，如有差异，请以英文原文为准。

求助全文

约1分钟内获得全文求助全文

来源期刊

Journal of Vacuum Science & Technology A 工程技术-材料科学：膜

CiteScore

5.10

自引率

10.30%

发文量

247

审稿时长

2.1 months

期刊介绍： Journal of Vacuum Science & Technology A publishes reports of original research, letters, and review articles that focus on fundamental scientific understanding of interfaces, surfaces, plasmas and thin films and on using this understanding to advance the state-of-the-art in various technological applications.