Accuracy of yield impact calculation based on kill ratio

Abstract

We evaluated the accuracy of yield impact calculations based on kill ratio analysis. The accuracy was calculated using computer simulated defect maps and bin maps. The results show that the yield impact was inaccurate when parametric faults caused low yield or a large number of non-killer defects were included in inspection reports. It is therefore recommended to evaluate bin maps and reduce the non-killer defects before calculating the yield impact.