Advanced Process Control: benefits for photolithography process control

Abstract

High volume, cost effective, manufacturing of state of the art lithography processes requires in depth understanding of Process and Process-Tool interaction to achieve Advanced Process Control (APC). The APC systems being deployed at Infineon Technologies, Richmond has shown and is expected to continue demonstrating continuous improvement for the following primary metrics: /spl middot/ OL and CD Cpk /spl middot/ Rework Reduction /spl middot/ Reduction of MTTD /spl middot/ Lot Cycle Time improvement.